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The quality parameters assessed
This Document applies to the shelf life of properly packaged
and development work
SEMI C14-95 (first published)
the actual diameter of nominal 300 mm wafers may millimeters smaller
E02100 - SEMI E21 - Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport StdPbc-0521 The quality parameters assessedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to simplify cluster tool implementation in the fab. Equipment suppliers are required to provide modules that can be connected into any cluster tool using the specifications contained
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